Scanning Electron Microscope Jeol JSM-6510

Electron source

Tungsten cathode

Accelerating voltage

0,5 to 30 kV

Resolution in the SE image

3 nm at 30 kV, 15 nm at 1 kV

Magnification

x5 to x300 000

Sample stage (travel)

X: 80 mm, Y: 40 mm, Z: 6 to 45 mm

Detectors

secondary and backscattered electron detector


Location: University of Bayreuth


Contact: M.Sc. Jacqueline Uhm
Phone: +49(0)921 55 74 61
Fax: +49(0)921 55 74 73
Email: jacqueline.uhm@uni-bayreuth.de